Identification of resistance anomalies due to absorption current
You can identify high resistance and open areas in the wiring from the absorption current image.
- Possible to identify high resistance abnormal areas - The current flowing through the wiring is weak (pA) - Measurement is possible even with a surface protective film present - Measurement is possible even with multilayered wiring - Measurement is possible under conditions almost identical to SEM observation
- Company:一般財団法人材料科学技術振興財団 MST
- Price:Other